Title :
Analysis of the Effect of ESD on the Operation of MEMs
Author :
Greason, William D.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Western Ontario, London, ON
Abstract :
The effect of charge injection due to electrostatic discharge (ESD) on the operation of capacitive micro-electromechanical systems (MEMS) structures is studied. An analysis of charge transfer for the human body model (HBM), charged device model (CDM) and field induced charged device model (FCDM) is presented. The reliability of MEMS due to trapped charge is assessed using a figure of merit based on forces due to voltage and charge states of operation and the critical charge for breakdown of dielectrics.
Keywords :
charge injection; electrostatic discharge; micromechanical devices; reliability; MEMS; capacitive microelectromechanical systems structures; charge transfer; charged device model; dielectric breakdown; electrostatic discharge; field induced charged device model; figure of merit; human body model; Biological system modeling; Breakdown voltage; Capacitance; Charge transfer; Conductors; Dielectric breakdown; Electrostatic discharge; Humans; Microelectromechanical systems; Micromechanical devices;
Conference_Titel :
Industry Applications Society Annual Meeting, 2008. IAS '08. IEEE
Conference_Location :
Edmonton, Alta.
Print_ISBN :
978-1-4244-2278-4
Electronic_ISBN :
0197-2618
DOI :
10.1109/08IAS.2008.104
