DocumentCode
3211259
Title
Investigation of reliability problems in thermal inkjet printhead
Author
Lim, Ji-hyuk ; Keon-Kuk ; Shin, Seung-loo ; Baek, Seog-Soon ; Kim, Young-lae ; Shin, Long-Woo ; Oh, Yong-Soo
Author_Institution
MEMS Lab., Samsung Adv. Inst. of Technol., Gyeonggi-Do, South Korea
fYear
2004
fDate
25-29 April 2004
Firstpage
251
Lastpage
254
Abstract
This paper presents a failure analysis result for enhancing the reliability of thermal inkjet printhead. A novel inkjet printhead is fabricated using MEMS process, and we analyze the failure mechanism of inkjet head based on detailed experimental observations. The design modification of micro heater to avoid an early stage of failure yields the reliability enhancement of printhead.
Keywords
electromigration; failure analysis; ink jet printers; micromechanical devices; semiconductor device reliability; MEMS process; design modification; micro heater; reliability problems; thermal inkjet printhead; Current; Failure analysis; Ink; Micromechanical devices; Nickel; Optical microscopy; Scanning electron microscopy; Shape; Surface cracks; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium Proceedings, 2004. 42nd Annual. 2004 IEEE International
Print_ISBN
0-7803-8315-X
Type
conf
DOI
10.1109/RELPHY.2004.1315332
Filename
1315332
Link To Document