A fiber-optic tactile microsensor for detection of tip of a fiberscope

Author

Tohyama, O. ; Maeda, S. ; Itoh, H.

Author_Institution

Central Res. Lab., Mitsubishi Cable Ind. Ltd., Itami, Japan

fYear

1998

fDate

20-24 July 1998

Abstract

A fiber-optic tactile microsensor has been developed and estimated. The sensing principle is based on the detection of optical reflection intensity changes from a diaphragm located in front of an optical fiber. The sensors have been fabricated using silicon micromachining and laser ablation processes. For the transmitting source and signal light, a multimode optical fiber 50/125 /spl mu/m (core/clad) in diameter is used. The results show that easy and safe tactile measurements are possible in blood vessels. This paper describes the structure, fabrication process and performance of the sensor.

Keywords

biosensors; fibre optic sensors; laser ablation; micro-optics; micromachining; microsensors; reflectivity; tactile sensors; 125 mum; 50 mum; biosensors; blood vessel; fabrication process; fiber-optic tactile microsensor; fiberscope tip detection; laser ablation process; multimode optical fiber; optical reflection intensity changes; sensing principle; signal light; silicon micromachining; tactility measurements; transmitting source; Blood vessels; Fiber lasers; Laser ablation; Micromachining; Microsensors; Optical detectors; Optical fiber sensors; Optical fibers; Optical reflection; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings

Conference_Location

Monterey, CA, USA

Print_ISBN

0-7803-4953-9

Type

conf

DOI

10.1109/LEOSST.1998.689721

Filename

689721