Development of NEG Coating for RHIC Experimental Beamtubes

As RHIC beam intensity increases beyond original scope, pressure rises have been observed in some regions. The luminosity limiting pressure rises are associated with electron multi-pacting, electron stimulated desorption and beam induced desorption. Non-Evaporable Getter (NEG) coated beamtubes have been proven effective to suppress pressure rise in synchrotron radiation facilities. Standard beamtubes have been NEG coated by a vendor and added to many RHIC UHV regions. BNL is developing a cylindrical magnetron sputtering system to NEG coat special beryllium beamtubes installed in RHIC experimental regions. It features a hollow, liquid cooled cathode producing power density of 500W/m and deposition rate of 5000 Angstrom/hr on 7.5cm OD beamtube. The cathode, a titanium tube partially covered with zirconium and vanadium ribbons, is oriented for horizontal coating of 4m long chambers. Ribbons and magnets are arranged to provide uniform sputtering distribution and deposited NEG composition. Vacuum performance of NEG coated tubes was measured. Coating was analyzed with energy dispersion spectroscopy, auger electron spectroscopy and scanning electron microscopy. System design, development, and analysis results are presented.