DocumentCode :
3216300
Title :
Testing of pumping speed of miniature sputtering ion pump
Author :
Tian Liang ; Sen Zhang ; Wang, C.F.
Author_Institution :
Nanjing Sanle Electron. Inf. Ind. Group Co, Ltd., Nanjing, China
fYear :
2010
fDate :
14-16 Oct. 2010
Firstpage :
534
Lastpage :
535
Abstract :
This paper discusses about testing of pumping speed. A sputtering ion pump consists basically of two electrodes, anode and cathode, and a magnet. The method for testing pumping speed is called dynamic flow conductance.
Keywords :
electrochemical electrodes; ion pumps; sputtering; testing; velocity measurement; anode; cathode; dynamic flow conductance; electrode; magnet; pumping speed; speed testing; sputtering ion pump; Anodes;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-6645-0
Type :
conf
DOI :
10.1109/IVESC.2010.5644208
Filename :
5644208
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3216300
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