DocumentCode :
3216392
Title :
Ambient gas properties of field emission devices
Author :
Jinchan Wang ; Xiaobing Zhang ; Wei Lei ; Fuming Mao ; Yunkang Cui
Author_Institution :
Sch. of Electron. Sci. & Eng., Southeast Univ., Nanjing, China
fYear :
2010
fDate :
14-16 Oct. 2010
Firstpage :
297
Lastpage :
298
Abstract :
In order to study whether the ambient gases affect the emission current stability of the cathode, the cathode should be the same one. In addition, the working condition should be kept constant except the ambient gas condition, so that other factors, which may also lead to the emission current degradation of the cathode, can be avoided. Only the influence from the residual gases will be concerned. For this consideration, an experimental system was set up, as shown in Fig. 1. It consisted of a vacuum system with a quadrupole mass spectrometer (QMS) and FE device opening set to introduce the residual gases inside the FE device into the analysis system.
Keywords :
cathodes; electron field emission; vacuum microelectronics; ambient gas condition; ambient gas properties; analysis system; cathode; emission current degradation; emission current stability; experimental system; field emission devices; quadrupole mass spectrometer; residual gases; vacuum system; working condition; Educational institutions;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-6645-0
Type :
conf
DOI :
10.1109/IVESC.2010.5644211
Filename :
5644211
Link To Document :
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