Optimal design and fabrication of a rotary microactuator

The electrostatic rotary microactuators integrating optimally curved electrodes are proposed to enhance the actuating force-generation capability. In most conventional type of electrostatic microactuators using rotary mode, the electrodes have not been rigorously evaluated in terms of optimality for the shape and simply have adopted a straight shape. As a result, two neighboring electrodes should be spaced in the way of leading to relative large clearance at the far region from the center of rotation, hence the force generation capability is inherently limited. To overcome the limitation, the optimally curved electrode shape introduced by tilting the electrodes in a continuous manner along with the radius