Technology and applications of micromachined membrane deformable mirrors

Author

Vdovin, G. ; Sarro, P.M. ; Middelhoek, S.

Author_Institution

Lab. of Electron. Instrum., Delft Univ. of Technol., Netherlands

fYear

1998

fDate

20-24 July 1998

Abstract

We report on technology and applications of micromachined membrane deformable mirrors (MMDM). The MMDM is formed by a thin flexible membrane, coated with a reflective material and stretched over the electrostatic actuator structure. The membrane can be locally deflected by applying voltages to the electrostatic actuators, these local deflections can be superimposed to form the necessary optical figure.

Keywords

Zernike polynomials; aberrations; adaptive optics; astronomical telescopes; beam steering; electrostatic actuators; membranes; micro-optics; micromachining; mirrors; optical control; optical design techniques; optical focusing; optical scanners; Zernike terms; adaptive mirror; astronomical adaptive optics; beam steering; defocus correction; electrostatic actuator structure; laser beam shaping; locally deflected; low-order aberrations; micromachined membrane deformable mirrors; modal optimization; optical quality; projection scanner; reflective material coated; temporal response; thin flexible membrane; tilt correction; voltage application; Apertures; Biomembranes; Damping; Electrostatic actuators; Laboratories; Laser beams; Mirrors; Resonant frequency; Shape control; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings

Conference_Location

Monterey, CA, USA

Print_ISBN

0-7803-4953-9

Type

conf

DOI

10.1109/LEOSST.1998.689743

Filename

689743