Title :
Investigation of high frequency vacuum devices using micro-fabrication
Author :
Jinjun Feng ; Jun Cai ; Yinfu Hu ; Hanyan Li ; Ye Tang ; Xianping Wu ; Bo Qu ; Tiechang Yan
Author_Institution :
Vacuum Electron. Nat. Lab., Beijing Vacuum Electron. Res. Inst., Beijing, China
Abstract :
Investigation of high frequency vacuum devices using microfabrication is reported. TWT and BWO design and simulation is discussed. Design is based on theoretical analysis and equivalent circuit method.
Keywords :
backward wave oscillators; design; equivalent circuits; microfabrication; micromechanical devices; millimetre wave oscillators; BWO; MEMS; TWT; design; equivalent circuit method; high frequency vacuum devices; microfabrication; millimeter wave structures;
Conference_Titel :
Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-6645-0
DOI :
10.1109/IVESC.2010.5644352
