• DocumentCode
    3219332
  • Title

    Hundreds of electron beams from a single source

  • Author

    Kruit, P. ; Mohammadi-Gheidari, A.

  • Author_Institution
    Delft Univ. of Technol., Delft, Netherlands
  • fYear
    2010
  • fDate
    14-16 Oct. 2010
  • Firstpage
    31
  • Lastpage
    32
  • Abstract
    Most electron sources are used to create a single beam. For high resolution instruments such as electron microscopes and electron lithography machines, most of the current that is emitted by the source is cut away by apertures. The typical emission current from a CRT (Cathode Ray Tube) impregnated tungsten source is hundreds of milli-amperes and from a Schottky source (field assisted emission from a ZrO covered tungsten tip) is tens of microamperes, while the typical beam currents in high resolution instruments are pico-amperes up to tens of nano-amperes. This means there is room to use these sources for creating hundreds of sub-beams, at the same brightness (A/m2srV) as the single beam.
  • Keywords
    cathode-ray tubes; electron beams; electron sources; tungsten; CRT; Schottky source; cathode ray tube; electron beam; electron sources; emission current; field assisted emission; tungsten source; Arrays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
  • Conference_Location
    Nanjing
  • Print_ISBN
    978-1-4244-6645-0
  • Type

    conf

  • DOI
    10.1109/IVESC.2010.5644355
  • Filename
    5644355