Title :
ZnO nanomaterials based SAW ethanol gas sensor
Author :
Wu, Yaowu ; Li, Xin ; Liu, Juhua ; Yu, L.M. ; Hu, X.D.
Author_Institution :
Sch. of Electron. & Inf. Eng., Xi´an Jiaotong Univ., Xi´an, China
Abstract :
In this paper, ZnO nanomaterials with high effective specific surface area have been prepared and subsequently deposited on the SAW transducer as sensitive layer, finally the responses of the sensor to different ethanol gas concentrations were investigated at room temperature.
Keywords :
II-VI semiconductors; gas sensors; nanofabrication; nanostructured materials; semiconductor growth; surface acoustic wave sensors; surface acoustic wave transducers; wide band gap semiconductors; zinc compounds; SAW ethanol gas sensor; SAW transducer; ZnO; ZnO nanomaterials; effective specific surface area; ethanol gas concentrations; sensitive layer; temperature 293 K to 298 K; Ethanol; Integrated circuits;
Conference_Titel :
Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-6645-0
DOI :
10.1109/IVESC.2010.5644417
