DocumentCode
322099
Title
An Intelligent Robotic Vision System For Wafer Inspection In An Industrial Environment
Author
Mital, D.P. ; Teoh, E.K. ; Yong, I.N.
Author_Institution
Nanyang Technological Institute
Volume
1
fYear
1988
fDate
24-28 Oct. 1988
Firstpage
270
Lastpage
275
Keywords
Consumer electronics; Image processing; Inspection; Intelligent robots; Intelligent systems; Machine vision; Production systems; Robot vision systems; Robotics and automation; Service robots;
fLanguage
English
Publisher
ieee
Conference_Titel
Industrial Electronics Society, 1988. IECON '88. Proceedings., 14 Annual Conference of
Conference_Location
Singapore
Type
conf
DOI
10.1109/IECON.1988.662381
Filename
662381
Link To Document