• DocumentCode
    322111
  • Title

    Theoretical predictions and experimental results for transverse modes in SAW cavities

  • Author

    Malocha, Donald C. ; Abbott, Benjamin P. ; Knapp, Scott M.

  • Author_Institution
    Center for Appl. Acoustoelectron. Technol., Central Florida Univ., Orlando, FL, USA
  • Volume
    1
  • fYear
    1997
  • fDate
    5-8 Oct 1997
  • Firstpage
    1
  • Abstract
    This paper presents experimental and theoretical results for the lowest two mode separation in transversely coupled resonators. The theory is based on the stacked matrix approach which allows analysis of an arbitrary number of coupled waveguides. A family of curves of mode separation versus normalized aluminum film thickness is generated for various beam widths and waveguide coupling regions. Analysis includes the material velocity anisotropy and aluminum film layer velocity effects. The results of the theoretical analysis show the effects of the predicted mode separation when including the isotropic and anisotropic velocity effect on quartz for various device parameters. The mode separation family of curves are then compared versus measured transverse coupled resonator data for various device configurations. The experimental and theoretical predictions show good agreement. Results of these curves demonstrate that there are optimum values of aluminum film thickness for a given set of device parameters chosen and examples will be presented
  • Keywords
    aluminium; quartz; surface acoustic wave resonators; surface acoustic wave waveguides; ultrasonic velocity; SAW cavities; SiO2-Al; anisotropic velocity effect; coupled waveguides; isotropic velocity effect; material velocity anisotropy; mode separation; normalized aluminum film thickness; quartz; stacked matrix approach; transverse coupled resonator data; transverse modes; transversely coupled resonators; waveguide coupling regions; Aluminum; Anisotropic magnetoresistance; Bars; Gratings; Solids; Substrates; Surface acoustic waves; Transducers; Transmission line matrix methods; Waveguide theory;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
  • Conference_Location
    Toronto, Ont.
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-4153-8
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1997.662968
  • Filename
    662968