Propagation characteristics of longitudinal leaky SAW in Al-grating structure

Author

Isobe, A. ; Hikita, M. ; Asai, K.

Author_Institution

Central Res. Lab., Hitachi Ltd., Kokubunji, Japan

Volume

1

fYear

1997

fDate

5-8 Oct 1997

Firstpage

17

Abstract

New longitudinal leaky SAWs with small propagation losses and high velocities in lithium niobate and lithium tantalate have been found. Their velocities are 6100 to 6500 m/s in lithium niobate and 5200 to 5800 m/s in lithium tantalate. Their propagation losses are almost negligible only in the case of an Al grating structure. For example, the relative Al thickness to the SAW wavelength must be 8.4% for 171°YZ´-LN, while for 133°YZ´-LT, the value must be within 9.2%. These propagation properties were obtained by using a simulator that combined both finite-element and analytical methods. These results were also well confirmed by measuring the impedance responses of one-port SAW resonators in experiments

Keywords

aluminium; finite element analysis; lithium compounds; losses; surface acoustic wave resonators; surface acoustic waves; ultrasonic propagation; ultrasonic velocity; Al; Al grating structure; Al-grating structure; LiNbO₃; LiTaO₃; analytical methods; finite-element methods; high velocities; impedance response; lithium niobate; lithium tantalate; longitudinal leaky SAW; longitudinal leaky SAWs; one-port SAW resonators; propagation characteristics; small propagation losses; Analytical models; Electrodes; Equations; Fingers; Impedance measurement; Lithium compounds; Lithium niobate; Propagation losses; SAW filters; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE

Conference_Location

Toronto, Ont.

ISSN

1051-0117

Print_ISBN

0-7803-4153-8

Type

conf

DOI

10.1109/ULTSYM.1997.662971

Filename

662971