New properties of the SAW gas sensing

Author

Anisimkin, V.I. ; Verardi, P. ; Verona, E.

Author_Institution

Inst. of Radio Eng., Acad. of Sci., Moscow, Russia

Volume

1

fYear

1997

fDate

5-8 Oct 1997

Firstpage

405

Abstract

Novel attractive properties of SAW gas sensing are theoretically predicted and experimentally verified. It is demonstrated that the SAW response can be increased, decreased, reversed, cancelled, speeded up, aged down and selected without changing the sensitive layer, simply by properly selecting the acoustic substrate material and its crystallographic orientation. These new properties are shown to come from the elliptic polarization of the acoustic wave and from its dependence on the propagation conditions. An experimental verification of the theoretical predictions is carried out on SAW H₂ sensors using both Pd and Pd:Ni sensitive films, deposited on ATx-, STx- and yx-quartz substrates upon exposure to 1% H₂+N₂, 1% CO+N₂ and 1% N₂O+N ₂ gas mixtures. These new peculiarities will make possible to develop a new generation of SAW sensors

Keywords

Rayleigh waves; gas sensors; polarisation; surface acoustic wave sensors; H₂; H₂ sensors; Pd; Pd sensitive films; Pd:Ni; Pd:Ni sensitive films; Rayleigh type mode; SAW gas sensing; SAW response; acoustic substrate material selection; crystallographic orientation dependence; elliptic polarization; gas mixtures; propagation conditions; quartz substrates; selective gas detection; Acoustic materials; Acoustic propagation; Acoustic sensors; Acoustic waves; Aging; Crystalline materials; Crystallography; Gas detectors; Polarization; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE

Conference_Location

Toronto, Ont.

ISSN

1051-0117

Print_ISBN

0-7803-4153-8

Type

conf

DOI

10.1109/ULTSYM.1997.663049

Filename

663049