SAW chemical sensors using multiple parameters in decision process

Author

Hohkawa, K. ; Komine, K. ; Suzuki, H. ; Eguchi, T. ; Noge, S. ; Ikawa, H.

Author_Institution

Kanagawa Inst. of Technol., Japan

Volume

1

fYear

1997

fDate

5-8 Oct 1997

Firstpage

441

Abstract

This paper presents results of a basic study for making a highly functional SAW sensor using multiple parameters, such as loss and heating up effects in addition to the parameter of phase, in decision process. We used a porous films of rubber and alumina which have a possibility to enhance these effects. We have studied basic characteristics of devices using these films

Keywords

adsorption; alumina; chemical sensors; polymer films; porous materials; rubber; surface acoustic wave delay lines; surface acoustic wave resonators; surface acoustic wave sensors; SAW chemical sensors; adsorption characteristics; alumina; chemical interface; decision process; delay line; heating up effects; highly functional SAW sensor; insertion loss; loss effects; multiple parameters; phase change; porous films; resonator; rubber; time dependent variation; Bonding; Chemical sensors; Gas detectors; Optical films; Optical resonators; Optical sensors; Polymer films; Sensor phenomena and characterization; Surface acoustic wave devices; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE

Conference_Location

Toronto, Ont.

ISSN

1051-0117

Print_ISBN

0-7803-4153-8

Type

conf

DOI

10.1109/ULTSYM.1997.663058

Filename

663058