Title :
ZnO nanowires film UV detector based MSM structure
Author :
He, Y.N. ; Zhang, Wensheng ; Zhang, S.C. ; Qi, M. ; Ye, Mao ; Li, Xin ; Xu, Y.L.
Author_Institution :
Sch. of Electron. & Inf. Eng., Xi´an Jiaotong Univ., Xi´an, China
Abstract :
In this paper, a prototype UV detector of MSM (metal-semiconductor-metal) structure based ZnO nanowires film was designed and fabricated, and then tested under UV illumination.
Keywords :
II-VI semiconductors; metal-semiconductor-metal structures; nanofabrication; nanowires; semiconductor quantum wires; semiconductor thin films; ultraviolet detectors; wide band gap semiconductors; zinc compounds; MSM structure; UV detector; UV illumination; ZnO; metal-semiconductor-metal structure; nanofabrication; nanowire film; wide band gap semiconductors; Electrodes; Nanowires; Zinc oxide;
Conference_Titel :
Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-6645-0
DOI :
10.1109/IVESC.2010.5644465