• DocumentCode
    322186
  • Title

    Towards the determination of elastic constants on a submicron scale using scanning acoustic force microscopy

  • Author

    Hesjedal, T. ; Chilla, E. ; Fröhlich, H.J.

  • Author_Institution
    Paul-Drude-Inst. for Solid-State Electron., Berlin, Germany
  • Volume
    1
  • fYear
    1997
  • fDate
    5-8 Oct 1997
  • Firstpage
    549
  • Abstract
    This paper reports first steps towards the determination of elastic constants with submicron lateral resolution. The experimental phase velocity dispersion data were obtained on a micron scale using scanning acoustic force microscopy. The minimum of the corresponding error field is only weakly localized, thus giving a large error for the elastic constants. The localization can not be increased by using more of data points. In order to decrease the elastic constant´s error, a Love mode is additionally regarded. However, the error field crossing is in this case not leading to a significant increase of the accuracy. We propose the inclusion of further surface guided modes
  • Keywords
    Love waves; acoustic microscopy; atomic force microscopy; elastic constants; measurement errors; surface acoustic waves; ultrasonic velocity; Love mode; elastic constants; error field; phase velocity dispersion; scanning acoustic force microscopy; submicron lateral resolution; submicron scale; surface guided modes; Acoustic measurements; Acoustic signal detection; Dispersion; Force measurement; Microscopy; Phase detection; Phase measurement; Surface acoustic waves; Ultrasonic variables measurement; Velocity measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
  • Conference_Location
    Toronto, Ont.
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-4153-8
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1997.663081
  • Filename
    663081