DocumentCode
3221972
Title
Tip scanning dynamic SFM using piezoelectric cantilever for full wafer inspection
Author
Chu, J. ; Maeda, R. ; Itoh, T. ; Suga, T.
Author_Institution
Mech. Eng. Lab., AIST/MITI, Ibaraki, Japan
fYear
1999
fDate
6-8 July 1999
Firstpage
164
Lastpage
165
Abstract
The dynamic scanning force microscope (DSFM) has proven itself as a versatile instrument for science and technology. It has made possible the measurement of surface structures with sizes ranging from a single atom to several micrometers. But practically, the samples to be inspected are often too big to fit the SFM sample stage of traditional SFM systems. In this report, we propose a new structure of DSFM compatible with full wafer inspection.
Keywords
atomic force microscopy; inspection; semiconductor device testing; surface structure; SFM sample stage; dynamic scanning force microscope; full wafer inspection; piezoelectric cantilever; surface structures; tip scanning dynamic SFM; Atomic measurements; Electrodes; Force sensors; Gold; Inspection; Instruments; Mechanical engineering; Piezoelectric films; Resonance; Scanning electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1999. Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International
Conference_Location
Yokohama, Japan
Print_ISBN
4-930813-97-2
Type
conf
DOI
10.1109/IMNC.1999.797528
Filename
797528
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