Title :
Fabrication of quartz micro-capillary electrophoresis chips for health care devices
Author :
Kikuchi, Toshiaki ; Ujiie, Takekazu ; Ichiki, Takanori ; Horiike, Yasuhiro
Author_Institution :
Toyo Univ., Kawagoe, Japan
Abstract :
We proposed the "health care device", which is an intelligent micro-analytical system for the on-chip inspection of human health. As a first step we have fabricated a quartz micro-capillary electrophoresis chip using high density plasma etching and demonstrated its high-performance capillary electrophoresis operation.
Keywords :
biomedical measurement; biosensors; capillarity; chromatography; electrochemical sensors; electrophoresis; microfluidics; microsensors; quartz; sputter etching; /spl mu/-TAS; SiO/sub 2/; electrochromatography; electroosmotic flow; fabrication; health care devices; high density plasma etching; high-performance capillary electrophoresis; intelligent microanalytical system; on-chip inspection; quartz microcapillary electrophoresis chips; Electrokinetics; Etching; Fabrication; Humans; Inspection; Intelligent systems; Plasma applications; Plasma density; Plasma devices; System-on-a-chip;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1999. Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International
Conference_Location :
Yokohama, Japan
Print_ISBN :
4-930813-97-2
DOI :
10.1109/IMNC.1999.797535
