Screen Printing Of Thick Piezoelectric PZT Layers Onto Silicon Micromachined Membranes

Author

Koch, M. ; Harris, N. ; Evans, A.G.R. ; White, N.M. ; Brunnschweiler, A.

Author_Institution

University of Southampton

fYear

1997

fDate

35754

Firstpage

42401

Lastpage

42403

fLanguage

English

Publisher

iet

Conference_Titel

Recent Advances in Micromachining Techniques (Digest No: 1997/081), IEE Colloquium

Conference_Location

IET

Type

Filename

663257

Link To Document