Closed-loop measurement of equipment efficiency and equipment capacity

Author

Leachman, Robert C.

Author_Institution

Dept. of Ind. Eng. & Oper. Res., California Univ., Berkeley, CA, USA

fYear

1995

fDate

13-15 Nov 1995

Firstpage

115

Lastpage

126

Abstract

Formal definitions for the components of efficiency and capacity, mathematical formulas for computing overall efficiency, and data collection strategies are proposed for rigorous measurement of equipment efficiency and equipment capacity. Measurement of overall equipment efficiency (OEE) under the TPM paradigm is extended to support the maintenance of capacity parameters for production planning. The weaknesses of equipment analyses based on utilization and aggregate UPH (units per hour) figures are contrasted against the robustness of the proposed approach. Implementation in semiconductor factories is described.

Keywords

closed loop systems; human resource management; integrated circuit manufacture; integrated circuit measurement; maintenance engineering; production testing; TPM paradigm; closed-loop measurement; data collection strategies; equipment analyses; equipment capacity; overall equipment efficiency; production planning; semiconductor factories; total productive maintenance; Capacity planning; Job shop scheduling; Manufacturing industries; Performance evaluation; Production facilities; Production planning; Productivity; Semiconductor device manufacture; Time measurement; Total quality management;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1995. ASMC 95 Proceedings. IEEE/SEMI 1995

ISSN

1078-8743

Print_ISBN

0-7803-2713-6

Type

conf

DOI

10.1109/ASMC.1995.484352

Filename

484352