Electrical control of synthesis conditions for locally grown CNTs on polysilicon microstructure

Carbon Nanotubes (CNTs) have been extensively studied in recent years for various applications using their extraordinary properties. Integration of CNTs into microsystems and CMOS circuits enables devices that use CNTs as nano-functional components. This work investigates the local synthesis and integration of CNTs into a microsystem fabricated by a commercial process - PolyMUMPs. The proposed synthesis process is automated, scalable to wafer-level, and performed at ambient temperature. The obtained results show great promise for a low-cost, wafer-level process for the integration of CNTs into microsystems and CMOS circuits.