• DocumentCode
    322581
  • Title

    Film manometric thermocouple transducer

  • Author

    Bychkovskii, Roman

  • Author_Institution
    State Univ., Lviv, Ukraine
  • fYear
    1997
  • fDate
    26-29 Aug 1997
  • Firstpage
    745
  • Lastpage
    747
  • Abstract
    An analog of the PMT-2 tube manometer thermocouple transducer fabricated using thin-film technology is described. The transducer may have a wider range of application because the source and the heat detector are separated and the output signal is higher due to larger number of thermocouples. The transducers fabricated on mica substrates operate at pressures ranging from 760 to 10-5, 10-1 to 103 and 50 to 1 torr, those on polyimide substrates operate in the range of 103-102 torr. The transducers have passed mechanical and climatic, a 500-h time-to-failure, and ozone tests
  • Keywords
    manometers; pressure transducers; thermocouples; thin film resistors; 103 to 102 torr; 1E-1 to 1E-3 torr; 50 to 1 torr; 760 to 1E-5 torr; climatic tests; film manometric thermocouple transducer; larger number of thermocouples; mica substrates; ozone tests; polyimide substrates; pressure transducer; thin-film technology; time-to-failure; Detectors; Heat transfer; Packaging; Pressure measurement; Resistors; Substrates; Thermal conductivity; Thermal resistance; Transducers; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermoelectrics, 1997. Proceedings ICT '97. XVI International Conference on
  • Conference_Location
    Dresden
  • ISSN
    1094-2734
  • Print_ISBN
    0-7803-4057-4
  • Type

    conf

  • DOI
    10.1109/ICT.1997.667637
  • Filename
    667637
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=322581