Title :
An efficient design tool for transmission line on SIMOX substrates
Author :
Raskin, J.P. ; Huynen, I. ; Gillon, R. ; Vanhoenacker, D. ; Colinge, J.P.
Author_Institution :
Microwave Lab., Katholieke Univ., Leuven, Belgium
fDate :
30 Sep-3 Oct 1996
Abstract :
Planar metallizations on surface-passivated semiconductor substrates have become a familiar form of signal transmission with the rapid development of the monolithic integrated circuit technology now extending into the microwave frequency region. However, little is known at present concerning the transmission properties of such a composite structure. In this paper we present the behaviour of the SOI substrate as function of frequency. A new model of transmission line is developed and compared with measurements of CPW lines realized on various SIMOX substrates
Keywords :
MMIC; SIMOX; UHF integrated circuits; coplanar waveguides; integrated circuit design; integrated circuit metallisation; substrates; transmission line theory; variational techniques; CPW lines; SIMOX substrates; SOI substrate; Si; composite structure; design tool; monolithic integrated circuit technology; planar metallizations; surface-passivated semiconductor substrates; transmission line model; transmission properties; Distributed parameter circuits; Integrated circuit metallization; Integrated circuit technology; Microwave frequencies; Microwave technology; Monolithic integrated circuits; Planar transmission lines; Substrates; Transmission line measurements; Transmission lines;
Conference_Titel :
SOI Conference, 1996. Proceedings., 1996 IEEE International
Conference_Location :
Sanibel Island, FL
Print_ISBN :
0-7803-3315-2
DOI :
10.1109/SOI.1996.552477
