Title :
Tapered microstructure for impedance matching using PDMS moulding
Author :
Wu, Dawei ; Wright, Alan ; Harris, Paul
Author_Institution :
Ind. Res. Ltd., Lower Hutt, New Zealand
Abstract :
The object of this work is to consider the feasibility of making a tapered acoustic matching material using microfabrication techniques. Linearly tapered microstructures having a base width of 5-10 μm and height of 20-50 μm were fabricated by using double sided, dual angle lithographic methods to form an SU8 mould. Into this Polydimethylsiloxane (PDMS) is cast which is then electroplated. This method of construction is compared with our earlier work and it was found that it simplifies electroplating and greatly reduces costs. In addition, with this method fluid-metal taper sections are possible.
Keywords :
electroplating; impedance matching; moulding; PDMS moulding; dual angle lithographic method; electroplating; fluid metal taper sections; impedance matching; linearly tapered microstructures; microfabrication technique; polydimethylsiloxane; tapered acoustic matching material; Acoustics; Fabrication; Impedance; Materials; Metals; Microstructure; acoustic matching; impedance; moulding; tapered;
Conference_Titel :
Ultrasonics Symposium (IUS), 2011 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
978-1-4577-1253-1
DOI :
10.1109/ULTSYM.2011.0482