Repeatability performance of non-contact probes in the 500–750GHz band

Author

Caglayan, Cosan ; Trichopoulos, Georgios C. ; Sertel, Kubilay

Author_Institution

ElectroScience Lab., Ohio State Univ., Columbus, OH, USA

fYear

2015

fDate

22-22 May 2015

Firstpage

1

Lastpage

3

Abstract

We present the repeatability performance of an automated non-contact probe system for on-wafer device and integrated circuit characterization in the 500-750 GHz band. Unlike conventional contact-probe systems, a computer controlled x-y translation stage is employed to realize a completely automated non-contact probe setup. Thanks to this simplicity, far superior repeatability performance can be achieved with great ease. We present the repeatability study specifically for the 500-750 GHz band utilizing a precision servo system with 1 micron translation accuracy. At 625 GHz, our setup achieves 2.2° deviation in phase and 4.4% deviation in magnitude for 25 successive measurements spanning over 1.5 hours. This fully computerized non-contact probe system also facilitates intermittent re-calibrations that are normally needed for reliable sub-mmW measurements.

Keywords

calibration; digital control; servomechanisms; submillimetre wave integrated circuits; submillimetre wave measurement; wafer-scale integration; automated noncontact probe repeatability performance; computer controlled x-y translation stage; computerized noncontact probe system; frequency 500 GHz to 750 GHz; integrated circuit characterization; intermittent recalibration; on-wafer device; precision servo system; reliable sub-mmW measurement; Antenna measurements; Calibration; Coplanar waveguides; Performance evaluation; Probes; Standards; Transmission line measurements;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Measurement Conference (ARFTG), 2015 85th

Conference_Location

Phoenix, AZ

Type

conf

DOI

10.1109/ARFTG.2015.7162909

Filename

7162909