Laser-assisted imprinting of nanostructured glass

Author

Sato, Toshimi ; Nagato, Keisuke ; Choi, Junho ; Hamaguchi, Tetsuya ; Nakao, Masayuki

Author_Institution

Dept. of Mech. Eng., Univ. of Tokyo, Tokyo, Japan

fYear

2011

fDate

15-18 Aug. 2011

Firstpage

1

Lastpage

4

Abstract

Nanostructured glass is expected to be used for high-function devices. Nanoimprinting is one of the mass fabrication methods of nanostructures; however, it has a disadvantage of a long cycle time. In this paper, we propose and demonstrate a high-throughput method in which only the surfaces of the glass and a mold are heated with a laser. The mold consists of two layers; a layer transparent to light (quartz) and a light-absorption layer (diamond-like carbon). We demonstrated the imprinting of micron- and nanosize patterns on an optical glass and confirmed that the imprinting resolution was approximately 100 nm.

Keywords

diamond-like carbon; heat treatment; laser beam effects; laser materials processing; light absorption; moulding; nanofabrication; nanostructured materials; optical glass; quartz; transparency; SiO₂; diamond-like carbon; glass surface; heat treatment; high-function device; high-throughput method; laser-assisted nanoimprinting; light absorption layer; light transparency; mass fabrication method; microsize pattern; mold; nanosize pattern; nanostructured glass; optical glass; quartz; Films; Glass; Heating; Optical device fabrication; Power lasers; Radiation effects; glass; imprinting; laser;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on

Conference_Location

Portland, OR

ISSN

1944-9399

Print_ISBN

978-1-4577-1514-3

Electronic_ISBN

1944-9399

Type

conf

DOI

10.1109/NANO.2011.6144501

Filename

6144501