• DocumentCode
    3230952
  • Title

    Fabrication of antireflection structure by simple annealing of Fe film

  • Author

    Suehiro, Daisuke ; Nagato, Keisuke ; Hamaguchi, Tetsuya ; Nakao, Masayuki

  • Author_Institution
    Dept. of Mech. Eng., Univ. of Tokyo, Tokyo, Japan
  • fYear
    2011
  • fDate
    15-18 Aug. 2011
  • Firstpage
    588
  • Lastpage
    591
  • Abstract
    We have proposed a method of fabricating antireflection structures by annealing an Fe film. By annealing an Fe film in air, iron oxide nanowires can be easily synthesized. Iron oxide nanowires, however, are unsuitable as antireflection structures on their own. The novel process is annealing the nanowires with reduction. By annealing with reduction, the nanowires are transformed into conical structures that are considered to be suitable for antireflection. This method will lead to the low-cost fabrication of antireflection structures.
  • Keywords
    annealing; antireflection coatings; iron; metallic thin films; Fe; annealing; antireflection structure; conical structure; low cost fabrication; nanowires; Annealing; Films; Iron; Nanowires; Reflectivity; Shape; Substrates; annealing; antireflection structure; iron oxide nanowires; reduction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on
  • Conference_Location
    Portland, OR
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4577-1514-3
  • Electronic_ISBN
    1944-9399
  • Type

    conf

  • DOI
    10.1109/NANO.2011.6144637
  • Filename
    6144637