DocumentCode
3230952
Title
Fabrication of antireflection structure by simple annealing of Fe film
Author
Suehiro, Daisuke ; Nagato, Keisuke ; Hamaguchi, Tetsuya ; Nakao, Masayuki
Author_Institution
Dept. of Mech. Eng., Univ. of Tokyo, Tokyo, Japan
fYear
2011
fDate
15-18 Aug. 2011
Firstpage
588
Lastpage
591
Abstract
We have proposed a method of fabricating antireflection structures by annealing an Fe film. By annealing an Fe film in air, iron oxide nanowires can be easily synthesized. Iron oxide nanowires, however, are unsuitable as antireflection structures on their own. The novel process is annealing the nanowires with reduction. By annealing with reduction, the nanowires are transformed into conical structures that are considered to be suitable for antireflection. This method will lead to the low-cost fabrication of antireflection structures.
Keywords
annealing; antireflection coatings; iron; metallic thin films; Fe; annealing; antireflection structure; conical structure; low cost fabrication; nanowires; Annealing; Films; Iron; Nanowires; Reflectivity; Shape; Substrates; annealing; antireflection structure; iron oxide nanowires; reduction;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on
Conference_Location
Portland, OR
ISSN
1944-9399
Print_ISBN
978-1-4577-1514-3
Electronic_ISBN
1944-9399
Type
conf
DOI
10.1109/NANO.2011.6144637
Filename
6144637
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