Title :
Implementing state of the art advanced process control and factory automation solutions at White Oak Semiconductor
Author :
Urenda, Tim ; Dowd, Tim ; Dimond, Kevin ; Schulze, Brad
Author_Institution :
White Oak Semicond., Sandston, VA, USA
Abstract :
This paper describes the partnership SEMY Engineering, Inc. and White Oak Semiconductor formed to successfully provide automation and advanced process control (APC) solutions from a combination of proprietary and commercially available software systems. The White Oak factory objective was to implement a computer integrated manufacturing (CIM) system providing full availability of all necessary data for yield analysis and process control. Semiconductor production throughput and reliability at White Oak has significantly increased using this implementation. A large ROI (>500%) has already been realized in the lithography cell in the first year alone
Keywords :
computer integrated manufacturing; integrated circuit manufacture; process control; production engineering computing; CIM system; SEMY Engineering; White Oak Semiconductor; advanced process control; computer integrated manufacturing system; factory automation; lithography cell; reliability improvement; semiconductor production throughput improvement; software systems; yield analysis; Availability; Computer integrated manufacturing; Control system analysis; Data analysis; Manufacturing automation; Process control; Production facilities; Semiconductor device reliability; Software systems; Throughput;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1999 IEEE/SEMI
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-5217-3
DOI :
10.1109/ASMC.1999.798192
