Title :
A CAD tool for RF MEMS devices
Author :
Pande, Rajesh ; Patrikar, Rajendra
Author_Institution :
Dept. of Electron. & Comput. Sci., Visvesvaraya Nat. Inst. of Technol., Nagpur
Abstract :
A stable, multiple energy domain and multi scale simulation tool for microsystems is developed. A structured design methodology is adopted for design and optimization of RF MEMS shunt switch and MEMS inductor. The CAD tool developed is a device specific and incorporates physical parameters such as surface roughness. The tool analyzes the impact of surface roughness and also does thermal analysis. These are useful for understanding reliability and failure mechanisms of RF MEMS components.
Keywords :
CAD; electronic engineering computing; failure analysis; inductors; microswitches; reliability; surface roughness; thermal analysis; CAD tool; MEMS inductor; RF MEMS components; RF MEMS devices; RF MEMS shunt switch; failure mechanisms; multi scale simulation tool; multiple energy domain; reliability; surface roughness; thermal analysis; Design automation; Design methodology; Design optimization; Inductors; Micromechanical devices; Radiofrequency microelectromechanical systems; Rough surfaces; Shunt (electrical); Surface roughness; Switches;
Conference_Titel :
Design Automation Conference, 2008. ASPDAC 2008. Asia and South Pacific
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1921-0
Electronic_ISBN :
978-1-4244-1922-7
DOI :
10.1109/ASPDAC.2008.4484067
