DocumentCode
3231815
Title
The total CIM system for semiconductor plants
Author
Mizokami, Yasuo
Author_Institution
OKI Electr. Ind. Co. Ltd., Tokyo, Japan
fYear
1990
fDate
21-23 May 1990
Firstpage
24
Lastpage
25
Abstract
A CIM (computer-integrated manufacturing) system implemented in a plant for memory-device production is described. It is noted that application of this system is making it possible to prevent operational error, to reduce manpower, and to improve quality control. After the installation of an ultraclean process, a high-yield VLSI plant with fewer operators was realized
Keywords
CAD/CAM; VLSI; integrated circuit manufacture; integrated memory circuits; manufacturing computer control; quality control; computer-integrated manufacturing; fewer operators; high-yield VLSI plant; memory-device production; prevent operational error; quality control; reduce manpower; semiconductor plants; total CIM system; ultraclean process; Automatic control; Automation; Computer integrated manufacturing; Computerized monitoring; Control systems; Production control; Production systems; Quality control; Transportation; Vehicles;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Science Symposium, 1990. ISMSS 1990., IEEE/SEMI International
Conference_Location
Burlingame, CA
Type
conf
DOI
10.1109/ISMSS.1990.66124
Filename
66124
Link To Document