Title :
Numerical simulation of the fluidic performance in a jet-based gyroscope
Author :
Sun, Lina ; Wang, Wei ; Yu, Tingting ; Zhang, Le ; Yan, Guizhen
Author_Institution :
Inst. of Microelectron., Peking Univ., Beijing
Abstract :
A novel jet-based micro gyroscope is designed and optimized numerically in this paper. The jetted airflow makes the angular rate sensor free of moveable proof-mass which greatly enhances its anti-shock capability. Flow performance of this circulating airflow inside the detection chamber is simulated by a CFD (computational fluid dynamic) tool. The numerical results provide convincing supports to the applicability of this novel jet- based gyroscope. Furthermore, a lumped-thermal model is adopted to predict the temperature difference between the two Pt heater/sensors which work as sensing parts.
Keywords :
computational fluid dynamics; flow simulation; gyroscopes; microfluidics; micromechanical devices; optimisation; rotational flow; FLUENT CFD software; MEMS gyroscopes; anti-shock capability; circulating airflow; computational fluid dynamics; flow performance; jet-based micro gyroscope; jetted airflow; lumped-thermal model; micro-electro-mechanical systems; numerical optimization; Biomembranes; Computational fluid dynamics; Force sensors; Gyroscopes; Micromechanical devices; Numerical simulation; Power system reliability; Predictive models; Temperature sensors; Thermal sensors; fluidic performance; jet-based gyroscope; numerical simulation;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
Conference_Location :
Sanya
Print_ISBN :
978-1-4244-1907-4
Electronic_ISBN :
978-1-4244-1908-1
DOI :
10.1109/NEMS.2008.4484349