DocumentCode :
3233723
Title :
A quadrature error and offset error suppression circuitry for Silicon Micro-Gyroscope
Author :
Yang, Bo ; Zhou, Bailing ; Wang, Shourong ; Huang, Libin ; Yin, Yong
Author_Institution :
Instrum. Sci. & Eng. Inst., Southeast Univ., Nanjing
fYear :
2008
fDate :
6-9 Jan. 2008
Firstpage :
422
Lastpage :
426
Abstract :
The performance of silicon micro-gyroscope (SMG) is influenced deeply by quadrature error and offset error. The reasons for inducing quadrature error and offset error are analyzed and the expressions of quadrature error and offset error are enduced. In order to eliminate the effects of the quadrature error and offset error, as well as the inherent non- linearity in the capacitance-type sensors, a closed-loop feedback control circuit with quadrature correction is designed. The opened-loop detecting circuit is also presented because the closed- loop control approach is motivated by special features of opened- loop detecting. The designed principle of frequency difference deltaf between drive mode and sense mode, as well as quality factor Qy, is brought forward. The results of the experiment indicate that the quadrature error and offset error are corrected. By comparing with opened-loop detecting, the closed-loop feedback control circuit with quadrature correction decreases the non- linearity of scale factor from 16.02% to 0.35%, widens the maximum rate capability from plusmn270deg /s toplusmn 370deg /s and increases the stability of zero bias by 2.5 times.
Keywords :
Q-factor; closed loop systems; control system synthesis; feedback; gyroscopes; open loop systems; silicon; stability; capacitance-type sensors; closed-loop feedback control; offset error suppression circuitry; opened-loop detecting circuit; quadrature error; quality factor; silicon microgyroscope; stability; Capacitance; Capacitive sensors; Error analysis; Error correction; Feedback circuits; Feedback control; Frequency; Linearity; Open loop systems; Silicon; closed-loop feedback; non-linearity; offset error; quadrature error; stability of zero bias;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
Conference_Location :
Sanya
Print_ISBN :
978-1-4244-1907-4
Electronic_ISBN :
978-1-4244-1908-1
Type :
conf
DOI :
10.1109/NEMS.2008.4484364
Filename :
4484364
Link To Document :
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