Title :
Dual mode cMUTs fabricated with LPCVD sacrificial release process
Author :
Certon, Dominique ; Sénégond, Nicolas ; Gross, Dominique ; Legros, Mathieu ; Boulmé, Audren ; Roman, Benoit ; Teston, Franck ; Férin, Guillaume
Author_Institution :
Univ. Francois Rabelais de Tours, Tours, France
Abstract :
This paper aims to develop an integrated dual mode ultrasonic transducers (based on cMUTs technology) for applications of targeted drug delivery dedicated to small animal experiments. Two functions are designed on the same transducer: one for high frequency imaging and the other for thermal activation of liposomes. Tests and performances evaluation are reported.
Keywords :
biomedical ultrasonics; chemical vapour deposition; drug delivery systems; ultrasonic transducers; LPCVD sacrificial release process; dual mode cMUT fabrication; high frequency imaging; integrated dual mode ultrasonic transducers; liposomes; small animal experiments; targeted drug delivery; thermal activation; Acoustic arrays; Acoustics; Imaging; Impedance; Time frequency analysis; Ultrasonic imaging; Electroacoustic transducers; cMUT; drug delivery; therapeutic ultrasounds;
Conference_Titel :
Ultrasonics Symposium (IUS), 2011 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
978-1-4577-1253-1
DOI :
10.1109/ULTSYM.2011.6293642
