DocumentCode :
3234739
Title :
Soft Lithographic Fabrication of Microresonators
Author :
Armani, A.M. ; Vahala, K.J.
Author_Institution :
California Inst. of Technol., Pasadena
fYear :
2007
fDate :
23-25 July 2007
Firstpage :
133
Lastpage :
134
Abstract :
Using ultra-high-Q toroid microcavity masters, soft lithography is applied to fabricate polymer microcavity arrays with Q factors in excess of 106 . This technique produces resonators with material-limited quality factors.
Keywords :
Q-factor; microcavities; micromechanical resonators; polymers; soft lithography; Q factors; microresonators; polymer microcavity arrays; soft lithography; toroid microcavity masters; Fabrication; Loss measurement; Microcavities; Optical polymers; Optical resonators; Optical scattering; Optical surface waves; Q factor; Q measurement; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE/LEOS Summer Topical Meetings, 2007 Digest of the
Conference_Location :
Portland, OR
ISSN :
1099-4742
Print_ISBN :
1-4244-0926-8
Electronic_ISBN :
1099-4742
Type :
conf
DOI :
10.1109/LEOSST.2007.4288368
Filename :
4288368
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3234739
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