Study of fabricated system based on laser

A digital multifunctional laser machining system, including mechanical structure, software of computer and control system, is designed. After briefly describing the laser machining system and principle of data processing, some objects are processed by CO₂ laser (75W). By analyzing experimental data and adding in error compensation, the structures with better quality are machined. In order to realize micro fabrication, a ultraviolet laser replaces CO₂ laser. With different laser parameters, some micro silicon structures will be fabricated. And a morphological characteristic is evaluated by optical microscopy.