Title :
High energy density ceramic film capacitors for compact pulsed power
Author :
Gu, X. ; shui, Q. ; Jiang, C. ; Sun, Y. ; Gundersen, M.A.
Author_Institution :
Dept. of Electr. Eng.-Electrophys., Univ. of Southern California, Los Angeles, CA
Abstract :
(Ba, Sr)TiO3 (BST) ceramic thin films have attained a presence in small-signal microelectronics applications due to their "dual-high" characteristics (high dielectric constant and high breakdown strength), which are essential in producing high energy density capacitors. In this paper we investigate the potential application of BST films to high voltage, high energy density capacitors in compact pulsed power system. Fabrication of BST film capacitors on silicon substrates by pulsed laser deposition is presented. The average dielectric constant of the deposited film is 780 for the frequency range from 100 Hz to 1 MHz. The dissipation factor of the film is less than 0.02 for the frequency range from 100 Hz to 200 kHz
Keywords :
barium compounds; ceramics; electric breakdown; permittivity; pulse generators; pulsed laser deposition; pulsed power technology; silicon; strontium compounds; substrates; thin film capacitors; titanium compounds; (Ba, Sr)TiO3 ceramic thin film; Ba0.5Sr0.5TiO3-Si; breakdown strength; compact pulsed power system; dielectric constant; dissipation factor; dual-high characteristics; energy density capacitor; pulsed laser deposition; silicon substrates; small-signal microelectronics application; Binary search trees; Capacitors; Ceramics; Dielectric breakdown; Dielectric thin films; Frequency; High-K gate dielectrics; Microelectronics; Pulse power systems; Pulsed laser deposition;
Conference_Titel :
Power Modulator Symposium, 2004 and 2004 High-Voltage Workshop. Conference Record of the Twenty-Sixth International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-8586-1
DOI :
10.1109/MODSYM.2004.1433511
