A 2-MHz, 6-kVA voltage-source inverter using low-profile MOSFET modules for low-temperature plasma generators

This paper presents a 2 MHz, 6-kVA voltage source inverter for low-temperature plasma generators. A new MOSFET module referred to as a “Mega Pack” is specially designed and fabricated for high-frequency high power applications. It has a low-profiled package equipped with four terminal plates. The main circuit consists of a single-phase full-bridge inverter using the four new modules. The modules´ layout is characterized by the two modules forming a half-bridge which are placed back-to-back with each other. Both device and circuit designs achieve great reduction of stray inductance in the main circuit. A prototype inverter shows stable operation around frequencies as high as 2 MHz