Title :
IntelliCAD: the CAD for MEMS
Author :
Maseeh, Fariborz
Abstract :
The absence of manufacturing know-how in an accessible and useful form explains much of micromanufacturer´s inability to supply the existing demand for microelectromechanical system(s) (MEMS). IntelliCAD is an integrated software tool that simulates the design and manufacturing of MEMS and the mechanical aspects of semiconductor structures. The aim of IntelliCAD is to fill the gap in microfabrication know-how and to reduce timely process iterations by first mimicking them on a workstation. IntelliCAD allows a single user or a group of users to design, fabricate, visualize, and test the performance of a device in a completely integrated environment
Keywords :
Automotive engineering; Biosensors; Costs; Fabrication; Manufacturing; Micromechanical devices; Semiconductor device manufacture; Silicon; Testing; Workstations;
Conference_Titel :
WESCON/'95. Conference record. 'Microelectronics Communications Technology Producing Quality Products Mobile and Portable Power Emerging Technologies'
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-2636-9
DOI :
10.1109/WESCON.1995.485298
