Title :
Miniature Fabry Perot spectrometers using micromachining technology
Author :
Zavracky, Paul M. ; Hennenberg, Erwin
Abstract :
In this paper, we will discuss the use of micromachining techniques and silicon microfabrication technology to create miniature, low cost replacements for conventional optical spectrometers
Keywords :
Costs; Etching; Instruments; Micromachining; Optical films; Optical interferometry; Optical sensors; Optical surface waves; Silicon; Spectroscopy;
Conference_Titel :
WESCON/'95. Conference record. 'Microelectronics Communications Technology Producing Quality Products Mobile and Portable Power Emerging Technologies'
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-2636-9
DOI :
10.1109/WESCON.1995.485299
