Plasma diagnosis and charging damage

The importance of major plasma parameters (electron temperature, and ion and electron densities) in plasma-induced damage is discussed. Details of measuring these parameters with Langmuir probes are addressed. Special attention is paid to the errors often involved in the use of Langmuir probes and their consequences. Compensation methods for both RF and “slow” floating potential shifts to minimize measurement errors are discussed. An alternative method to measure electron temperature (T_e), trace rare gases-optical emission spectroscopy (TRG-OES), is discussed along with the measurement of the electron energy distribution function (EEDF). Since pulsed plasmas show promise for reducing charging and damage, their parameters measured by various methods are also included