Micromechanical sensors

System integration is often limited by the incompatibility of the technologies used for the fabrication of sensors and actuators. Most of the problems related to conventional transducers, such as miniaturization, performance, and price, can be overcome by the use of silicon as a mechanical material. Therefore, there is a rapidly increasing demand for micromachined silicon transducers. The author reviews the advantages of silicon for sensor applications and the relevant characteristics of silicon. He outlines the fabrication processes used for silicon micromachining. The potential of this technology is illustrated by various examples of micromechanical sensors. The multidisciplinary use of silicon for mechanical and electronic functions on the same chip leads to completely new sensor and system concepts. Included are piezoelectric and piezoresistive devices, piezojunction transistors, accelerometers, and pressure, tactile, flow, radiation and chemical sensors. Diagrams, graphs, and photographs are provided