A comprehensive study of material and structural designs of bulk acoustic resonator (BAR) filters for wireless applications

Author

Pao, James J. ; Kyi, Wilson ; Riaziat, Majid ; Huo, Yijie

Author_Institution

OEpic Semicond. Inc., Sunnyvale, CA, USA

fYear

2015

fDate

March 30 2015-April 1 2015

Firstpage

1

Lastpage

4

Abstract

A study of a solidly mounted bulk acoustic wave resonator (SMR) filter is presented. An overall design and fabrication summary is described, with both materials and structures of the resonator devices considered. Aluminum Nitride (AlN) is utilized as the piezoelectric material to convert electromagnetic signals to acoustic waves. Molybdenum (Mo) is used as the electrode material. A distributed Bragg reflector (DBR) stack of alternating Tungsten (W) and Silicon Dioxide (SiO2) is embedded. Basic device fabrication process steps are presented, and measured filter responses are compared with simulated filter responses.

Keywords

bulk acoustic wave devices; piezoelectric materials; resonator filters; BAR filters; DBR stack; SMR filter; distributed Bragg reflector stack; filter responses; piezoelectric material; solidly mounted bulk acoustic wave resonator filter; Acoustic waves; Aluminum nitride; Band-pass filters; III-V semiconductor materials; Microwave filters; Mirrors; Resonator filters; BAR; DBR; SMR; filters; resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Wireless Symposium (IWS), 2015 IEEE International

Conference_Location

Shenzhen

Type

conf

DOI

10.1109/IEEE-IWS.2015.7164555

Filename

7164555