Title :
1999 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.99CH36325)
Abstract :
Presents the front cover from the conference proceedings.
Keywords :
CMOS integrated circuits; DRAM chips; VLSI; dielectric thin films; ferroelectric storage; flash memories; integrated circuit reliability; integrated circuit technology; silicon-on-insulator; CMOS technology; DRAM technology; RF devices; SOI technology; channel engineering; dielectric reliability; ferroelectric memories; flash memory; gate dielectrics; interconnect technology; shallow junctions;
Conference_Titel :
VLSI Technology, 1999. Digest of Technical Papers. 1999 Symposium on
Conference_Location :
Kyoto, Japan
Print_ISBN :
4-930813-93-X
DOI :
10.1109/VLSIT.1999.799310
