Title :
IEEE/SEMI International Semiconductor Manufacturing Science Symposium. (Cat. No.90CH2810-0)
Abstract :
The following topics were dealt with: IC manufacture; manufacturing management; computer integrated manufacturing; expert systems; process control; equipment performance; equipment reliability; design for manufacturing; and leading-edge technologies
Keywords :
expert systems; integrated circuit manufacture; process control; IC manufacture; computer integrated manufacturing; design for manufacturing; equipment performance; equipment reliability; expert systems; leading-edge technologies; manufacturing management; process control;
Conference_Titel :
Semiconductor Manufacturing Science Symposium, 1990. ISMSS 1990., IEEE/SEMI International
Conference_Location :
Burlingame, CA, USA
DOI :
10.1109/ISMSS.1990.66140
