DocumentCode
3252001
Title
High Performance and Low Power Devices
fYear
2006
fDate
Oct. 2006
Firstpage
14
Lastpage
14
Keywords
Annealing; CMOS technology; Geometrical optics; MOSFETs; Radio frequency; Semiconductor device manufacture; Semiconductor lasers; Silicon on insulator technology; Space technology; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
International SOI Conference, 2006 IEEE
Conference_Location
Niagara Falls, NY, USA
ISSN
1078-621X
Print_ISBN
1-4244-0290-5
Electronic_ISBN
1078-621X
Type
conf
DOI
10.1109/SOI.2006.284408
Filename
4062856
Link To Document