DocumentCode
3252178
Title
SOI Materials and Characterization
fYear
2006
fDate
Oct. 2006
Firstpage
28
Lastpage
28
Keywords
Bonding; Laboratories; Microwave devices; Microwave photonics; Microwave technology; Optical materials; Performance analysis; Research and development; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
International SOI Conference, 2006 IEEE
Conference_Location
Niagara Falls, NY, USA
ISSN
1078-621X
Print_ISBN
1-4244-0290-5
Electronic_ISBN
1078-621X
Type
conf
DOI
10.1109/SOI.2006.284416
Filename
4062864
Link To Document