Title :
A Nanoscale bSPIFET to Overcome CMOS Scaling
Author :
Lin, Jyi-Tsong ; Eng, Yi-Chuen ; Lee, Tai-Yi ; Lin, Kao-Cheng
Author_Institution :
Dept. of Electr. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung
Abstract :
In this paper, we are working on a probe into the effects of gate length (Lg) variation upon the nanoscale silicon on partial insulator field-effect transistor with block oxide (bSPIFET) being use for deca-nanometer age
Keywords :
CMOS integrated circuits; field effect transistors; semiconductor device manufacture; silicon-on-insulator; CMOS scaling; Si; deca nanometer; gate length variation; nanoscale bSPIFET; nanoscale silicon partial insulator field effect transistor with block oxide; Conference proceedings; Doping; Etching; FETs; Immune system; Insulation; Nanoscale devices; Probes; Silicon on insulator technology; Sun;
Conference_Titel :
International SOI Conference, 2006 IEEE
Conference_Location :
Niagara Falls, NY
Print_ISBN :
1-4244-0289-1
Electronic_ISBN :
1078-621X
DOI :
10.1109/SOI.2006.284445