DocumentCode
3256248
Title
[Front cover]
Volume
1
fYear
2006
fDate
27-29 Sept. 2006
Abstract
The following topics are dealt with: nanoscience and nanoengineering; advanced microwave devices and circuits; RF MEMS and NEMS; microphotonics; microsensors; microstructures for bio and medical applications; physics of materials; advanced devices and structures; materials for semiconductor devices; modelling and simulation; integrated circuits
Keywords
integrated circuit technology; micromechanical devices; microsensors; microwave devices; monolithic integrated circuits; nanoelectronics; semiconductor devices; semiconductor technology; NEMS; RF MEMS; biomedical applications; integrated circuits; microphotonics; microsensors; microstructures; microwave circuits; microwave devices; nanoengineering; nanoscience; semiconductor devices;
fLanguage
English
Publisher
ieee
Conference_Titel
International Semiconductor Conference, 2006
Conference_Location
Sinaia
Print_ISBN
1-4244-0109-7
Type
conf
DOI
10.1109/SMICND.2006.283912
Filename
4063139
Link To Document